it seems that your cohesive parameters are not good.
With that E (6e7) you defined and with damage evolution of 0.0002 your S is 1.2e4, which doesn't make sense if you consider that you placed Damage initiation with maxS (5e7,7e7,7e7).
It means that when you reach maxS your element should be evolved entirely and should have full degradation, which can not be.
Therefore, check your parameters for the cohesive zone. For better understanding, try to sketch traction separation law, put the values there and see the relations.