I was using direct current (DC) heating method for cleaning of native Germanium Oxide (GeOx) layer from the top of the Ge(001) substrate. For doing this, I had kept the Ge(001) substrate at 400 deg C for 12 hours and then flashed it at 800 deg C. After bring the ultra-clean substrate at low temperature, in-situ RHEED pattern shows formation ‘2 × ’ reconstruction. Followed by the cleaning, Au growth (in MBE method) also exhibited well ordered growth square (or slightly elongated rectangular) shaped nanostructures.
But in-situ STM measurements shown that formation of square or rectangular shaped etch pit on the ultra-clean Ge(001) substrates.
Can you suggest me to overcome such undesirable formation of etch pits?