I don't know a simulation for MEMS, but there are some electronic softwares simulation like proteus
COMSOL, CoventorWare & MEMS+, Intellisuite are few of the software specially build for MEMS Simulation. You can find the tutorials of switch with each software
It all depends on what you want to simulate ...
If it concerns the mechanics, then ANSYS and COMSOL are good OK. If it concerns the electrical modeling, SPICE based simulators can do the work. If for RF application, you alos have special softwares. If you want to simulate the technological steps, Silvaco works fine, ...
In my gourp we have simulated NEMS switches, and we used a large variety of softwares (including all the ones cited previously). You have to be careful in the different paremeters, boundary conditions, models (large deformation might be needed in mechanical models), meshing, ... Simulations also have their limits, and sometimes it is difficult to adjust/found the parameters: the Young modulus can largely vary if you use polysilicon depending on the fab/machine you use, damping constants. And some physical parameters (like roughness) could be important in real device (because of sticking), and difficult to model.
Agree with Lauren. It is a multiphysical problem. commerical software can deal with some special cases, but cannot capture all the influencing factors. write your own code in matlab is another choice that you can try to solve your problem.
I have used COMSOL for MEMS simulation and it works good. Sometimes, you may get stuck with meshing and boundary conditions related errors but otherwise it is a pretty powerful tool.
The specialized software for MEMS is MEMS-Pro, you can use it for your analysis, but you can also used other packages like ANSYS, COMSOL, MSC/MARC etc
There are several softwares able to simulate MEMS switch, such as ANSYS, Intellisuites, COMSOL and CoventorWare etc. among them, CoventorWare seems to have the best capability to simulate the switch for many cases and many conditions. There is a module called Architect which can consider the problem like a black box. So we can just insert the input and wait for the result at its output.
As far as I know, commercial software that qualify for mems simulation is COMSOL, Simulia Abaqus and ANSYS. I have been exposed to COMSOL by attending demonstration seminar. COMSOL is well organized and their website has lots of examples and tutorials.COMSOL is specifically designed for physics problems. I am sure other (such as MEMS) are good. It all depends on your budget and type of problems you will be working on.
Comsol is agood software to solve Mems problems with good free presentation s papers and webinar at official site
So far, Comsol is still the best choice in terms of multiphysical simulation, as is the case for MEMS switch. You can combine Comsol with Matlab to do more post processing work.
hi Raghu Ramesh
http://ipasj.org/IIJIT/Volume3Issue1/IIJIT-2014-12-27-1.pdf
the ADS is one of the best Software for anything specially for MEMS in conjunction with RF performance like switch and else
Check it especially the Version 2014 and later
check this paper it's may be usefull
2012 IEEE Students’ Conference on Electrical, Electronics and Computer Science 978-1-4673-1515-9/12/$31.00 ©2012 IEEE Design and Simulation of RF MEMS Switchable Low Pass Filter M. Jeya Rani, M. Anitha, M. Arul Jothi and S. Kanthamani
IEEE_06184821.pdf
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