Which materials can be used in fabrication of infrared sensor and piezogenerator on the same chip?

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U. Dreher

SiO2 is a well-known for its piezoelectric properties and Si-based photodiodes are known as well. Thus an approach with an Si substrate might work.

Ingo Kuehne

PZT thin films are well suited for pyroelectric IR sensors and as piezoelectric generator material. ZnO and AlN are interesting alternatives.