In rapid thermal annealing usually we use Nitrogen, but in some articles I found Oxygen or Hydrogen is also used which gives better results. So which one is better among these three and what is the reason?
I prefer using Argon gas; it will prevent oxidation if your material might be affected by oxygen at high temperatures. Hydrogen is very sensitive; it may play a role in breaking bonds and forming new bondings. Argon gas Grade 5 can help can will not chemically react. Just take care of its molecular weight.
i heard about hydrogen annealing because of its permeability. i am not sure but i know it is a common environment for annealing the cold worked sheets of steel