Please help, it says that ECR plasma has bombardment effect, but where does the kinetic energy of ions come from? Does the substrate has to be negatively biased? I
Yanwei, lets consider an atom with protons and electrons with neutrons. The electronic repulsive forces continuously propels electrons to keep floating at imaginary concentric circles called orbitals. These electrons instead of dropping out of the atom are also attracted by the nuclear charge of the positive atomic centre. This just what happens to an atom and if you apply this knowledge you will overcome this challenge.