What type of metals can be an alternative as bottom electrode for PZT growth?

23 January 2019 1 7K Report

We are looking at different options than Platinum for bottom electrode on a PZT based piezo actuator? Any suggestion?

It needs to match the growth and be possibly of quite standard use in production cleanrooms.

thanks!!

I think sputtered molybdenum can be used, but I may be confusing this with another piezoelectric processing. Worth checking nonetheless.

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