Dear Dr. Sanghamitra Das,

here some etchants for tungsten and molybdenum and their alloys that you could try:

- Murakami's reagent (ASTM 98C): 10 g K3Fe(CN)6 (potassium ferricyanide), 10 g KOH or NaOH, 100 mL H2O - Swab 5 to 60 s; immersion will produce a stain etch; follow with water rinse, alcohol rinse, dry.

- Murakami's reagent (modified): 15 g K3Fe(CN)6, 2 g NaOH, 100 mL H2O

- Murakami's reagent (modified A): 30 g K3Fe(CN)6, 10 g NaOH, 200 mL H2O

- ASTM 131(a): 5 mL H2SO4, 1 mL HF, 100 mL 95% methanol - Electrolytic at 50 to 60 V for 10 to 20 s

- ASTM 132(a): 5 mL HF, 10 mL HNO3, 30 mL lactic acid - Swab with heavy pressure for 5 to 10 s; water rinse, alcohol rinse, dry, then swab etch using ASTM 98C for 5 to 30 s

- ASTM 209(a): 15 mL HNO3, 3 mL HF, 80 mL H2O - Immerse for 5 to 60 s

For more details, please see the source Metallography and Microstructures of Refractory Metals and Alloys, Metallography and Microstructures, Vol 9, ASM Handbook, ASM International, 2004, p. 877–888

Best regards, Pierluigi Traverso.

You may try to use (4% HCl + 3% H2O2) during several hours.

Hello Sanghamitra Das ,

Following the detailed answer from Pierluigi Traverso , you may find Maria's answer at the following RG discussion helpful:

https://www.researchgate.net/post/How_to_etch_the_Molybdenum_film_deposited_on_glass_substrate_by_sputtering_technique

Jules

Thank you everyone for your valuable suggestions

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