What is the value of interface trap and oxide trap energy level for 90nm technology node?

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Jagannath Samanta

You can see the following website for your query:

http://ptm.asu.edu/

Farzaneh Nakhaee

thanks for your answer.

but the formula which they used is different from one that S.zafar has been suggested. so there isn't any value for interface trap energy level and oxide trap energy level.

Samares Kar

Traps at the Si/SiO2 interface are distributed over the Si band gap; these are not single-level traps. There are some theoretical calculations of the oxide trap parameters; even less experimental information on the oxide trap energies. There is no consensus on the energy levels of the oxide traps; in any case, the oxide traps are likely to be present at various energy levels.