To get a very precise EBSD analysis, I need to have a perfect adjustments in the SEM to be able to detect small objects in high magnifications. For that a very good Beam/Source alignment is necessary.
I just want to ensure that what I am doing usually is correct (in JSM 7001F):
Source Alignment, PC18, then OL stig.
Beam Alignment, PC8, then OL stig.
I do this for any Acc. Voltage that I use. To do Source and Beam alignment, after Wobbling, I just adjust X,Y knobs until the image does not move.
Is the procedure correct? anybody has other experience? Because I sometimes do not get the sharpness I expect.
I read somewhere that for Source alignment you should not care about image movement and just adjust the X,Y knobs to get the brightest image, and then adjust the movement by Beam alignment.
dear colleague
the proceed: I do this for any Acc. Voltage that I use. To do Source and Beam alignment, after Wobbling, I just adjust X,Y knobs until the image does not move.
is correct , but don't work same times
see at manual
Dear Joao. In the manual I could not find anything regarding this. Can you forward me a copy of what you meant in the manual? Thanks
in general your proceeding is correct. I do the same. the stop of the image that confirm that the astigmatism is completed null .
but if your very high magnification, than is very difficult to obtain a good image.
same times the manual is the best. but not easy
i will go to send the normal proceeding for my Jeol and send you
best regards
Dear colleagues,
Take a look at how enjoyable training virtual S.E.M. procedures could get!
http://www.ammrf.org.au/myscope/sem/practice/virtualsem/
Best regards, Maria
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