In any device, the series resistance originates from the passive regions of the device. In the case of a Schottky diode the main contributions to the series resistance come from the spreading resistance, the bulk resistance of the substrate, and the back contact resistance. The first element has generally orders of magnitude smaller area than the second and the third elements, hence contributes most to the total series resistance. The speeding resistance is proportional to the substrate resistivity; hence, the series resistance of a typical Schottky diode will depend on the semiconductor resistivity.