What is the minimum gate length (L1 or L2) that can be fabricated in DMG structure? How do short channel effects relate to the ratio of L1 and L2?

06 June 2016 1 3K Report

What is the minimum gate length (L1 or L2) that can be fabricated in Dual metal Gate (DMG) structure? How do short channel effects relate to the ratio of L1 and L2?

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