I am planning to inspect a quartz sample to measure Diffused Argon (Ar) concentration at depths as small as 100 angstrom (depth profiling). Can anyone suggest whether it is possible to measure atomic concentrations of gases (i.e., Ar) as small as 107 or 108 atoms/cm3 (ppb) using Mass spectrometer? If so, which specific Mass Spec (i.e., SIMS) would be suitable? If not, what are the other options for such small measurements??
SIMS depth profiling of Ar in quartz will be quit difficult due to a low ion yield of Ar. So, the detection limit would be around 10^18 atoms/cm3, only, for magnetic sector SIMS. I see only one way to reduce the DL of such analysis: to heat the sample in vacuum and measure Ar in gas phase, but I have no experience with such technique.
I don't think you can reach ppb detection limit for 10nm thick layer with any method. As Yuriy Kudriavtsev said, SIMS will not even reach ppm DL while other methods will require more material to analyze.
From my brief experience in ToF-SIMS (IonTof SIMS 5) I can suggest that this might be possible at a very low energy of Ion gun and comparatively higher period of time for analyzer.
As the detection limit and resolution provided by ToF-SIMS is quite high compared to say MALDI or other SIMS technique.
I would suggest you to write a mail to analytical Division at Faunhofer IPMS-CNT, Dresden (https://www.ipms.fraunhofer.de/en/research-development/nanoelectronic/analytical-services.html) or to IonTof analytical sister company Tascon GmbH (Email - [email protected] Website - www.tascon.eu) and inquire if they can help you with the technicality.
agreed with Yuriy Kudriavtsev ; Ar only has significant detection as CsAr+ and yields are poor, notably in oxide matrix. proived your substrates are suffieciently smooth you could consider TXRF which should be capable of measuring a dose in the top ~20-30nm with few e10 at.cm-2 detection limit.
Perhaps LEIS (Low Energy Ion Scattering) could be able to detect monolayers or even submonolayers of an element on a surface. I am not familiar what are the depth profiling capabilities of this method. But you may contact company IONTOF or Tascon as mentioned above, which provide this method.
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