'm looking for an effective mechanical polishing technique to perform the technique EBSD about 2.5 niobium zirconium. I'm going to perform in a scanning electron microscope
according to my personal experience it is very hard if not impossible to achieve such good surface quality suitable for making EBSD on Zr materials by mechanical polishing only. The result was always bad. As an alternative people do preparations using ion beams in FIB microscopes and then making t-EBSD. But I did not succeed in achieveing good results using FIB and I did not have t-EBSD. Please check my two papers during my work at KIT. There is an explained very fast technique how I did it. And you can estimate the quality of EBSD scans achieved by this technique. I always started by mechanical polishing and always finished preparation by chemical polishing.