I have a sputtered Al layer, and want to know the etching rate in HCl at room temperature. All what I could find in literature were related with heated HCl bath, mainly 50 C.
I know the question is very old but... I'm also trying to find similar info (actually, even more interested at higher temperatures) but for some reason Researchgate doesn't show me the answer you got from Jerome that solved your doubt. Would you pls be so kind to repost the information?