Hi everyone,
I am trying to grow thin film of Ti2O3 by ebeam evaporation method. I cannot find the Z factor of this material of Ti2O3. I need Z factor to calibrate Tooling Factor of the ebeam system (PVD250, Kurt S. Lesker).
Could you please help me with it?
Thank you so much,
Regards,
Hi Vinh X Ho , You can use the NIST method to determine the unknown Z-Factor:
" Z-Factor is used to match the acoustic properties of the material being deposited to the acoustic properties of the base quartz material of the sensor crystal. Z-Factor = Zq / Zm For example, the acoustic impedance of gold is Z=23.18, so: Gold Z-Factor = 8.83 / 23.18 = .381 Unfortunately, Z Factor is not readily available for many materials. Z Factor can be calculated empirically using this method:
1. Deposit the material until Crystal Life is near 50%, or near the end of life, Page | whichever is sooner.
2. Place a new substrate adjacent to the used quartz sensor.
3. Set QCM Density to the calibrated value; Tooling to 100%. Zero thickness.
4. Deposit approximately 1000 to 5000 Å of material on the substrate.
5. Use a profilometer or interferometer to measure the actual substrate film thickness.
6. Adjust the Z Factor of the instrument until the correct thickness reading is shown. Another alternative is to change crystals frequently. For a crystal with 90% life, the error is negligible for even large errors in the programmed versus actual Z Factor."
Hope this helps!
Yes Vinh X Ho , you can take a look at this:
https://www.nist.gov/sites/default/files/documents/2017/05/09/Denton_Infinity22_Ebeam_Evaporator_USERMANUAL_v1.pdf
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