Suppose we have one element Si and another Co? How to distinguish between their Sputter yields at a specific energy? does it anyway related to te energy of the ion beam? If we take any alloy how to distinguish between these two?
Dear Basanta,
the sputter yield depends on the bonding of the element and the energy and type of the ions.
A list of sputter yields is provided in the first link.
A more detailed description of the sputter yield you can find in the second one (To my opinion an very nice description of this topic).
The third link describes the theory behind.
Good luck.
http://www.semicore.com/reference/sputtering-yields-reference
http://specs.de/cms/upload/PDFs/IQE11-35/sputter-info.pdf
http://static.sdu.dk/mediafiles/9/8/4/%7B984B2092-78B7-4EDC-9C91-3409C4941BFD%7DP.sigmund.elementsofsputteringtheory.pdf
sputtering yield refers to atoms/ion. If an ion of certain energy is hitting the target, and the target atoms are sputtering out, then how many target atoms are ejected out w.r.t to the momentum transfer of a single ion, this is known as sputtering yield.
In the previous response very useful papers have been referred, and you should refer a large number of papers by P. Sigmund on sputtering theory.
Definitely the sputtering yield depends on the incident ion energy to some extent, and also depends on the binding energy of the target atoms, the melting point of the target material. etc., For example Lead will have provide a much higher sputtering yield in comparison to titanium and zirconium.
K. Sreenivas
Prof. Gerhard Martens,
Thank you for the papers. I have gone through few of them. One question again crawls in my mind that how to get the yield of atoms in a binary alloy of composition far from 50-50 how to get the value of these yields for the individual elements.
Thank you Prof Sreenivas for your info.
Dear Basanta,
sorry I havn't got such data directly at hand but please search ('google') for ' sputter yield binary alloys' or similar buzz words. You will get a lot of results distributed in the result list. When adding 'researchgate' to them you will get documents with full texts or at least your are able to request full text versions for free. Please go through them.
One of them is attached in the link. Please have a look at table 2.
Remark: it is tough to read because some pages are upside down.
Good luck.
Article Alloy Sputtering
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