What is RIE lag effect?

Aravindkumar Yelashetty @Aravindkumar-Yelashetty-2

14 June 2016 1 9K Report

How this reactive ion etching lag effects for 3-5 semiconductors?Is there any graphs which tells about depth and width during etching process and i have a confusion how it is different for 4 and 3-5 semiconductors.any suggestion and links?

Yaksh Rawal

Hi,

I think following articles might be useful.

http://www-inst.eecs.berkeley.edu/~ee143/fa10/lectures/Lec_15.pdf

http://doc.utwente.nl/14247/1/rie_lag.pdf

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