Hi,
We are trying to measure film thickness for some ITO/glass samples using an S-Ellipsometer and I am having problems with finding a good model for the optical data. I appreciate suggestions from those who have had this experience before.
Thank you
May I suggest to measure your film thickness by Electrochemical Impedance Spectroscopy?
Try these initial optical constants for ITO or you can use them as reference for your film. The files contain dispersion relation of e1 and e2.
I was using Tauc-Lorentz and one Drude oscillator. What the hardware have you ?
@Robert Bogdanowicz Thanks Robert, we are using a JAW. 2000D SE. I think I can try and use what you are suggesting.
I have jobin yvon. If you would have any problems I could send you screenshot of model parametrization.
@Robert Bogdanowicz Thanks, I will try your model and let you know here how it worked out.
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