Focused ion beam (FIB) instruments can provide beams with a diameter (FWHM) of less than 10nm, however, the interaction between ions and target occurs over a large volume, given by the influence of the probe tails and multiple scattering laterally and the depth penetration of the ions in the vertical direction. What are the smallest nano-structures that have been made by FIB?
It really is a matter of both material properties and processing parameters for the patterning tool. Acording to manufacturers, beams can have diameters as small as 5 nm (for He+ if I recall correctly, 7 nm for Ga+), however, ion implantation profiles show differeces according to acceleration voltage and target material, thus, the minimum distance among the desired features plays a signficant role in how the process ought to be set up.
I have to agree. I guess, your question, Thomas, is related to the question, how small are nano-structures prepared by FIG which still reflect the original material you want investigate? This is the main problem with sample preparation. It is well know that with FIB you can easily cause phase transformation. If the transformation energy is small even a very gentle operation won't help. Some phases are even unstable under electron beam. The answer is really: it depends on what do you want to see. Sure, the material prepared, but about the conditions after preparation you can only have a guess (and experience). What you are planning to do?
You can learn about feature size and precision techniques in this paper.
Article Metal assisted focused-ion beam nanopatterning
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