What are the most important factors to be considered for development of multi-level UV-LIGA process?

11 February 2015 1 444 Report

Multi-level UV-LIGA process development

I am developing a multilevel UV-LIGA process for fabrication of some complex passive sensors. At present I am facing some issues related to process development and optmization.

How do you address issues such as what is most appropriate seed layer for UV-LIGA process?

How can I improve adhesion between Gold and SU8?

How do you achieve uniformity in nickel electroplating?

Is there any way to get uniform plating irrespective of mould features?

Looking for some helpful answers from experts.

Ankush Jain

Dear Jaising,

We had the similar concerns when we started fabrication of MEMS gyroscopes by SU-8 based UV-LIGA process. To answer few of your questions:

- Most appropriate seed layers for UV-LIGA process are Au and Cu.

- Adhesion between Gold and SU-8 can be improved by using Omnicoat.

- Uniformity in nickel electroplating can be achieved by selecting the appropriate current density, bath temperature, stirring speed etc.

You can also refer to the attached paper in which we have summarized the entire UV-LIGA process and have given the optimized process parameters.

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