What are the most important factors to be considered for development of multi-level UV-LIGA process?

11 February 2015 1 449 Report

Multi-level UV-LIGA process development

I am developing a multilevel UV-LIGA process for fabrication of some complex passive sensors. At present I am facing some issues related to process development and optmization.

How do you address issues such as what is most appropriate seed layer for UV-LIGA process?

How can I improve adhesion between Gold and SU8?

How do you achieve uniformity in nickel electroplating?

Is there any way to get uniform plating irrespective of mould features?

Looking for some helpful answers from experts.

Ankush Jain

Dear Jaising,

We had the similar concerns when we started fabrication of MEMS gyroscopes by SU-8 based UV-LIGA process. To answer few of your questions:

- Most appropriate seed layers for UV-LIGA process are Au and Cu.

- Adhesion between Gold and SU-8 can be improved by using Omnicoat.

- Uniformity in nickel electroplating can be achieved by selecting the appropriate current density, bath temperature, stirring speed etc.

You can also refer to the attached paper in which we have summarized the entire UV-LIGA process and have given the optimized process parameters.

Badges
Science topic

Which is the most efficient etching solution for nickel based alloys?

Which solution reveals the microstructure and features of nickel-based alloys?

02 March 2021 2,221 3 View

Do I need to strip the PVDF membrane before staining it with colloidal gold?

Dear Colleagues, After running Western blot on PVDF membrane and detection using ECL, I would like to stain my PVDF with colloidal gold to be able to allign the ECL image with total proteins on...

02 March 2021 7,829 3 View

How can I integrate a routing protocol in a tiny device (e.g. Raspberry Pi)?

Hi Community, I'm facing the issue of integration/compiling a new routing protocol in a WSN simulator. The final goal is to successfully add, configure this routing protocol in hardware devices...

01 March 2021 9,332 6 View

Which reagent is best among 'Dimethylglyoxime" and "Dithiothreitol" for spectroscopic determination of Nickel ?

What I think is Dithiothreitol. As it is water-soluble and does not form a precipitate. But, the thing is it contains sulphur which is quite hazardous to aquatic animals.

01 March 2021 8,374 4 View

POlymer+DMSO solution and moisture??

What could be the reason of moisture at the sides of Vial when I am preparing my polmyer+DMSO solution for membrane fabrication? What etiquettes I am possibly missing here?

28 February 2021 6,516 5 View

Unknown debris sheets observed in cell culture flasks?

Hi, We culture neural progenitor cells in T175 culture flasks coated with PLO-Laminin. We have successfully grown these cells with our protocol for months. Recently, we observed large sheets...

25 February 2021 3,443 4 View

Why there are two peaks while using the mie plot of Silver nanoparticle?

Hi, I am trying to learn the theoretical modelling of silver nanoparticle using the Mie scattering theory. After that, I discovered a software named Mieplot developed by Philip Laven, where it...

25 February 2021 7,493 6 View

Is there a suitable way to confine cell attachment area inside a multi-well plate?

Are there any types of cylindrical cell culture inserts that are designed to confine cell seeding area? Say, if I'm using a 12 well plate (3.5 cm^2/well), but only want to seed cells in the middle...

22 February 2021 7,127 4 View

Is there a method for evaluating nanoparticle adhesion to epithelial tissue in vitro?

I want to measure how well nanoparticles can transfect cells based on NP adhesion properties. In the literature I find people do it in animal studies, and epithelial adhesion helps in transfection...

21 February 2021 7,791 3 View

Is there a way to grow biofilm in lab to mimic biofilms in showers and baths? Also, how can I measure it?

Hello, I am new to biofilm research and have a question about growing and measuring biofilms. We want to research the effect of a type of enzymes in breaking down biofilms in showers, baths, hot...

14 February 2021 3,522 3 View