On any substrate (doped silicon, etc), at any scale (nano- , micro or even higher if currently possible).
HI,
For resolutions up to 1 um, regular photolithography is good option. but one need to design the mask which is little bit costly. Euro 550 for 7x7 cm2.
For few devices with higher resolution
Oh, Abhay, thank you very much for your detailed response, and sorry for not having answered for so long.
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