I am planning to make solutions containing different ratios of sulfuric acid and phosphoric acid. The purpose is to etch sapphire wafers. The etching is to be carried out at temperatures of about 180° to 200°C. What are some precautions that I need to exercise ?Like:

  • Which acid should I add to which to make the solutions ? Say, I am making sulfuric acid to phosphoric acid of 3:1. Does the procedure change if the ratio is reversed ?
  • Is it safe to carry out the etching in regular pyrex glassware ?
  • Is if safe to use a hot plate to heat the acid solution ?
  • Is there a low maximum heating rate of the solution under which I need operate under ?
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