I am aware of HF and H3PO4. I was wondering if there are some other solvents that dissolve Silicon Nitride selectively while leaving Silicon dioxide alone.
Hi
You can see the link below
https://ieeexplore.ieee.org/document/6235295/?part=1
Regards
The chemical dry etching of silicon nitride (Si3N4) in a downstream plasma reactor using CF4 , O2 is useful.
Read the attached articles
http://www.microtechweb.com/kb/nit_etch.htm
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