Can someone share information or experience about application of MEMS in precision measurements?

Just to provide an easy image of what we need to do, suppose I need to create the 3D model of an ant's gallery, by putting inside the hole a MEMS sensor that descends and measures turns and twists.

The acceptable error, in our specific case, is a few centimeters on 100 meters of travelled distance.

After examining many datasheets from various manufacturers, I fear that MEMS are not precise enough. On the other hand, I wonder if the newest devices that also integrate gyroscope and electronic compass can give us the desired precision.

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