To measure oxide film band gap, which of the two methods(XPS/AES) will give more information about the bulk and which will be more surface sensitive?

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Jixin Chen

An XPS sibling UPS my guess is what you meant. It is used to map the bandgap edge vs ground. I agree with Chaitanya Kumar

that UV-Vis and PL maybe cyclic voltametry is better for bandgap measurement.

Sarada K Gopinathan

You can do UV-DRS to easily find the band gap. From the data obtained plot the Kubelka-Munk or Tauc plot and extrapolate it to the x-axis to get the bandgap (eV). To find the band edge position please consider the Mott-Schottky plot which is directly co-related to the bandgap obtained from DRS data.