I deposited YSZ films by PLD. What I see that at RT deposition, a maximum thickness was achieved which sharply decreases to the minimum value at 573 K. With increase in substrate temperature further a rise in thickness was observed. The first thought came to my mind that re-evaporation at high temperature (573 k). But it should follow the trend, means decrease in thickness with temperature. Then I carried out the elemental analysis using EDX which showed absence of Y in the film deposited at 573 K. What could be the reason for this behavior ?

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