SU-8 soft baking and post exposure baking temperetures? What is the highest temperature can I used apart from 95c?

Ahmed TL @Ahmed-Tl

16 March 2018 1 3K Report

SU-8 soft baking and post exposure baking temperatures? What is the highest temperature can I use apart from 95C?

I do not mean hard baking as I do not need this step for my application.

Any idea?

Thanks

Ahmed TL

Zebing Mao

Thank you very much

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