Hello,
I have a question. there is a circular thin foil which vibrates in vacuum,
the foil restricted and moves up and down. it is like a diaphragm between two pipes . both sides are in vacuum but there is a small pressure difference. the pressure difference causes diaphragm displacement. we need to measure the foil displacement.
Foil diameter: 45 mm
Foil Thickness: 0.05 mm
Pressure: 10^-2 - 10^-3 Torr
maximum displacement: 70 micrometer
temperature: 100 C
I need to know which method or sensor is necessary to measure the displacement.
Thank you
It seems that Capacitive Position Sensors is type of sensors which can be suit for your task - see such sensors from MicroSense for example.
Dear Ali Afshar Farniya ,
You can use optical methods to measure such a displacement. For instance, check the standard method to measure the displacement of the micro-cantilever in the tapping/oscillating mode of Atomic Force Microscopy: a laser beam is reflected with a certain angle on the cantilever and it goes to a 4-sector photodiode, and the signal due to the cantilever oscillation is monitored in an oscilloscope. You should also check the literature in nanomechanical resonators, e.g. this recent article:
Article Optical Transduction for Vertical Nanowire Resonators
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