Dear Thomas Sir, I can't do the measurement right after the deposition as for measurement and even for growth I depend on other lab. but keeping your suggestion in mind I will try to do it as quickly as I can.
It also depends on what use do you plan for your thin WO3 films. If their use will allow them to adsorb the atmospheric humidity/ water it would be good to see the effect of this on the properties of interest of the thin film.
If the application is strictly related to encapsulated structures, you should keep your sample as close to the final use conditions as possible, and this involves the use of a desiccator or of an annealing treatment before depositing the next layer or before encapsulation.