Is it possible that a semiconductor when doped with transition metal may have its resistivity in the MegaOhm-cm range? The resistivity of the material without doping is however between 0.9 - 1 Ohm-cm.
It may depend on a multitude of factors. The information provided is not exhaustive enough to adequately address the question. Adding a dopant (How? How much?) can significantly affect both the electronic band structure and the crystal structure, as well as the quality of your contacts. Without sufficient details and with no basis for my answer, I doubt that a small doping (if it is indeed small) would affect your band structure to such an extent. However, what is generally observed may not necessarily apply to a specific material like yours. Therefore, I will focus more on the crystal structure, surface roughness, or the quality of the contacts.
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