DC glow discharge is hard to ignite in very low pressure of 0.001 mabar. For small systems (30 cm dia) the electron ionization mean free path routinely exceeds the system dimension for such a low pressure.
However for discharge ignited (breakdown) at higher pressure may be sustained in very low pressure in certain cases. Can any one suggest some reference papers or any other material which describes the DC glow discharge in very low pressure.
One example is DC Magnetron Sputtering discharge, but this uses special arrangement of magnets and confines plasma mainly near the cathode.