In this discussion, I have provided the main options and links to good sources:

https://www.researchgate.net/post/Please_help_how_can_i_calculate_the_quantitation_peak_mole_percentage_of_XPS_Data

Hello,

You can use CASA XPS software for data analysis, and in that software you can find the atomic percentage of different element present in your sample. you can also do the peak smoothening and many more process available in that software,

Dear Dr. Payalkumari Savaliya ,

I suggest you to have a first look at some free XPS Handbook/paper, present on the web, that can be useful for identification and interpretation of XPS data; for example:

-Handbook of X-ray Photoelectron Spectroscopy

Available at: https://www.hic.ch.ntu.edu.tw/PES/file/%E5%8F%83%E8%80%83%E8%B3%87%E6%96%99/XPS%20handbook.pdf

or at: https://mmrc.caltech.edu/XPS%20Info/XPS%201995%20Phi.pdf

-Introduction to x-ray photoelectron spectroscopy

Fred A. Stevie and Carrie L. Donley

J. Vac. Sci. Technol. A 38, 063204 (2020); doi: 10.1116/6.0000412

Available at: https://mmrc.caltech.edu/XPS%20Info/Practical%20Guides%20to%20XPS/Intro%20to%20XPS.pdf

-A Review of XPS Data-Banks

B. Vincent Crist in SIA (2007)

Available at: https://www.nanolabtechnologies.com/wp-content/uploads/2018/04/Critical-Review-of-XPS-DataBanks.pdf

Enjoy reading and good luck !!!

My best regards, Pierluigi Traverso (CNR-IAS-Genoa).