dear scholars
I have faced a great problem during working with arc PVD instrument. unfortunately, while I was trying to coat on faucets, targets turned off and grating valve became close. when I opened the door of chamber, all targets were short circuit and broken. the wall of chamber leaked through weld lines and cooling water came into the chamber. I really could not find the reason. could anyone help me please?
my coating condition: bias of cleaning:200 V, bias of coating 100, target Ti, mass flow of nitrogen:200
The unusual issue is that ALL the targets meaning that probably is not a mechanical root cause... try to check if water electric conductivity is too high or if the flow is unsufficient so that the temperature increase was eccessive and damaged o-ring... this for instance...
The unusual issue is that ALL the targets meaning that probably is not a mechanical root cause... try to check if water electric conductivity is too high or if the flow is unsufficient so that the temperature increase was eccessive and damaged o-ring... this for instance...
I agree with Simone Vezzù , however the values of process parameters required for a certain deposition in cathodic arc deposition varies in different publication mentioned in literature. Its always great to figure out the issues and earn experience with a machine but since, PVD equipments are costly and deposition is also a costly affair, in case the problem is persisting, instead of trying out different things, its better if you once contact the makers of the machine.
I agree with Simone Vezzù , however the values of process parameters required for a certain deposition in cathodic arc deposition varies in different publication mentioned in literature. Its always great to figure out the issues and earn experience with a machine but since, PVD equipments are costly and deposition is also a costly affair, in case the problem is persisting, instead of trying out different things, its better if you once contact the makers of the machine.
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