I have deposited Ni/Au 40nm/100nm using thermal evaporation technique @ 3 x 10-6 mbar on MoO3 nano-rods deposited on Si/SiO2 substrate but the problem is that the contacts are black in colors and not conductive. I have tried it many times but the results are same.

I suspects Ni is getting oxidized and Au is not properly deposited.

please suggest the possible reason and solution for the problem

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