Aluminum oxide is available on every aluminum surface, so an oxygen peaks can be very well there. Carbon is not shown correctly by EDS analysis, but carbon can also be present, for example, in embedding medium.
n the case of the preparation of Al of the group of Al alloys, the surface layer may be strongly oxidized and this may take into account the presence of O. The presence of C may be due to the casting pot which may have been C or the whole Of C. These assumptions can be confirmed by microstructural analysis of the samples and viewed on a microscope.
Another reason for the presence of C and O in EDS analysis is the predator's remnants of previous studies, which are also reported in this diagram.
A reason for your carbon peak could also be carbon deposition. This maybe stems from dirt e.g. from peviously investigated samples or tiny oil droplets from your vacuum pumps.
In transmission electron microscopy this was used to determine the thickness of the samples: If you have such a sample illuminated by an electron beam and especially if you focus your electrom beam on a spot on the sample you will observe a dark spot developing, which comes from carbon deposition. As these carbon peaks develop on both sides of a TEM sample, the distance (measured after tilting the sample) was a measure for the sample thickness.
Special care is mandatory in sample preparation. O and C peaks are the results of oxidation...a vacuum furnace is necessary for developing/designing a new alloy...You may also get some white spots in the SEM images, if your sample is highly oxidized and these will also effect mechanical properties of the candidate alloy...