Plz suggest how to etch the deposit material in atlas decbuild in silvaco international ?

19 July 2016 1 6K Report

I m working on deposition of zno in silicon for ohmic contact I deposit aluminum on zno , the design is done in atlas,,, bt the problem I face is that I m not able to etch the aluminum .. plz suggest solution

Syed Sadique Anwer Askari

Hello Mr. Kamil Zubair,

Atlas is nothing but device simulator. It is not a process simulator. if you want etch the deposited material you have to use Athena.

In atlas no need to use etch statement. Here you can directly put your structure in stack form.

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