If you're doing lithograph I'm guessing your dealing with XeCl or KIF laser? Depending on the intensity then wearing long sleeves/pants and gloves you should be fine, (with eye protection) If you are in a clean room then your bunny suit should be enough.
For standard UV lithography in a clean room we use the bunny suit and face shield with UV protection from LLG: CV83 P Face shield visor, PC with UV-protection, against mechanical hazards 9.005 066