In this case, thin films fabricated using DC magnetron sputtering method on Si substrate.
Dear Piramanayagam
Thank you for your response.
Actually, this is a complete structure of our thin films [Co(1.5nm)/Cu(x)]20 (x=1.0 nm). Data low angle-XRD that we have collected from 2θ=1º-12º. From this data, We want to estimate bilayer and total thickness respectively. Maybe do you have experience with it or any suggestion reference about it.
Dear Christian Eberl,
Thank you for your suggestion. I have plotted the data from Low angle-XRD and there are some peaks. So, which one I must chose to estimate the bilayer thickness.
In this case, do you have an idea about an explanation or approach theoretically so We can use the Bragg equations to estimate the thin film thickness.
By the way, I have read the paper about simulation using IMD software, but I can’t download the software at the link suggested in paper reference. Please, if you already have the software can you send it to me. Thank you for your cooperation.
Cheers,
Indra
You can use GIXRD/GISRD with low angle. Jou can find this paper .
Lim, G., Parrish, W., Ortiz, C and Hart, M. (1987), “Grazing Incidence Synchrotron X-ray Diffraction Method for Analyzing Thin Films”, Journal Materials Research, 2, p471-477.
Dear Christian Eberl,
Thank you for your explanation, I get the idea. I have checked our data, and you are right, there are 18 peaks. But, please do you have a letter or reference about the theoretical explanation, so We can use the Bragg equation to estimate the thickness of thin films and What is the difference interaction between X-Ray and material in low and high Angle.
Cheers,
Indra
Dear Prof. Simon Sembiring,
Thank you for suggestion Sir, but where I can find a GIXRD / GISRD characterization with low angle. At this time, We have collection data from Low angle-XRD with 2θ= 1-12º.
Cheers,
Indra
I think you can use as you find the paper. You get clearly the equation in the paper how to calculate the thickness. I already use the equation.
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