Plasma FIB (PFIB) using Xe: Anybody has experience in making TEM lamella with PFIB?

10 October 2015 1 4K Report

Normally we believe Xe ions must be more detrimental to the specimen's surface compare to Ga ions, since they are heavier and larger.

So personally I would not consider PFIB method suitable for TEM lamella preparation.

But I heard somewhere that using PFIB (using Xe) the amorphous layer of the TEM lamella is even thinner compare to the normal FIB (using Ga)! Physically I can not digest this as a fact!

Any experience?

Benjamin Myers

The range for Xe is lower due to increased stopping power so the amorphous layer will be thinner. The sputtering rate will be higher, so this may seem counterintuitive. Download SRIM and see for yourself! http://www.srim.org

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