Vapor pressure of HMDS is around 15 Torr at 20°C, this is enough to use in vapor phase if the pressure in your system is regulated around 1 Torr.

However, you should control the flow by using a dedicated low inlet pressure MFC.

OK, thank you Bachir Semmache .

Also I read in the MSDS that it is explosive if exposure to air within some limits. What would be your recommendation for handling it, while opening the container and pour it into the reservoir of the system?

Thanks!