I want the info regarding plasma technique to prepared the microchannel. Is we call as plasma etching machine or only plasma. Just need a help regarding plasma used for preparation of microchannels.
If this is not what you need forgive me, but I think what you are looking for RIE (Reactive Ion Etching). This link is a nice class presentation as an overview of RIE http://www-inst.eecs.berkeley.edu/~ee143/fa10/lectures/Lec_15.pdf. As far as specific plasmas and recipes, you need to provide more details such as what is the substrate, what is the block layer, and what are the channel dimensions. Also, it would help to understand what kind of reactor you are using. With these details I am sure someone can help point you in the correct direction.