Measurement of racetracks in sputtering targets?

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Gerhard Keller

Depends what is the usage time of your target.

If it is relatively new you can measure with a profilometer.

If it is older you can measure with the help a caliper.

The volume you calculate with the weight difference and the density.

Hope this helps

Gerhard

Nina Feldhofer

Thank you. Momentarily we are measuring it with a caliper. i just thought there might be some sort of laserscanning thingy that I could use to be more precise.

Yuriy Kudriavtsev

I think you can measure as well weight before and after using. The density is known so you can calculate lost volume.