I deposited different thicknesses of FeGaB ranging from 100nm to 400nm on a BAW resonator but the resonant frequency does not change. According to the theory of mass loading effect, the resonant frequency will decrease with the thickening of layers.
No, the mass loading effect is not available and true for all BAW resonators. It is a phenomenon that occurs when a mass is added to the surface of a BAW resonator, which causes the resonant frequency of the resonator to decrease. The amount of frequency shift is proportional to the mass of the load and the area of the resonator.
The mass loading effect is most pronounced in BAW resonators with small resonant frequencies and small areas. This is because the acoustic wave is more confined in these resonators, so the mass of the load has a greater effect on the frequency.
The mass loading effect can be used to improve the sensitivity of BAW resonators to mass changes. For example, it can be used to create sensors for detecting chemicals or biological molecules. However, it can also be a source of error in BAW resonators that are used for other applications, such as oscillators or filters.
In order to avoid the mass loading effect, BAW resonators can be designed with a large resonant frequency or a large area. They can also be made with a material that has a high acoustic impedance, such as quartz.
Here are some additional factors that can affect the mass loading effect in BAW resonators:
- The thickness of the piezoelectric layer
- The shape of the resonator
- The properties of the substrate
- The presence of other materials near the resonator
The mass loading effect is a complex phenomenon that depends on a variety of factors. It is important to consider all of these factors when designing or using BAW resonators.
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