Pd considered good contact material with graphene due to low contact resistivity. Usually, Pd/Au is used. However, deposition rates are not discussed in the papers. What is the deposition rate for Pd?
Dejan Davidovikj
I usually use a low deposition rate, around 0.5 A/s, which normally gives a very flat surface and doesn't heat up the sample that much. Hope this helps.
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Salamat Burzhuev
Thank you, Dejan. I was also using 0.5 A/s. Recently, Zhong et al. show that high purity Pd and evaporation at very low base pressures ( 10^-8 Torr) improve contact resistance. Therefore, I was thinking to try 1A/s or higher in order to deposit more pure Pd contacts.
Article is attached.
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