We have deposited conformal layer of Graphene on Si substrate using CVD. We wish to confirm graphene (otherwise at least carbon deposition) on Si substrate. Except NMR (for graphene) is there any other tool which confirm the formation of Graphene.
Do you have an SiO2 layer on your Si? Then, optical microscopy is sufficient (see link).
Otherwise ellipsometry might be useful.
http://arxiv.org/pdf/0705.0259.pdf
Thanks Matthias and Michel too.
I have try to deposited a graphene layer on Si-substrate (bare Si substrate).
Hi Ren
Thanks for response. I am in process to confirm it using Raman but the coating on Si substrate is too thin so I am wondering how I can use it for Raman?
Through literature I got that for Raman at least 1-2 mg sample is necessary but with Si substrate it seems impossible. Could u have idea ?
Dr. Singh
Dear Dr, Roy
Thanks for clarification. We have SEM measurement but after dent by tweezers should I record EDAX or just confirm by SEM micrographs? Pl. elaborate!
Dr. Singh
I do not think SEM or EDX is of any use here: graphene is visible on SiO2 only because of charge contrast, you will not have that on Si.
EDX with ALWAYS show you a small amount of carbon, as you always contaminate your sample by the beam, and this is much more than just a monolayer.
I agree that Raman should be helpful, it is sensitive to graphene monolayer. The other option may be XPS, this will tell you the chemical state of carbon - in SiC (which is most probable) or oxidised (you should see it if there is amorphous carbon).
I'm curious how do you plan to use NMR for a monolayer carbon?
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