While performing RMS roughness analysis, some researchers prefer bow/tilt correction and plane fitting etc. But most of the reports do not seem to follow a standard procedure. What is the meaning of plane fitting? What order should be chosen?

On analyzing my polymer thin film samples, I came across very large RMS roughness of 500-1000 nm which is not supposed to be that high. How do I choose the AFM image correction methods before I go for RMS roughness calculation?

thanks in advance

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