Two more suggestions:

- Layout editor, http://www.layouteditor.net/

- CLEwin, http://www.phoenixbv.com/product.php?prodid=50010105&prodtext=CleWin_5

LASI is a good choice in the fact that is freeware, but it requires a little more learning time than Layout or CLEwin.

AutoCAD or any other CAD tool are possible choices, but they require more attention when the output is to be converted into GDS format

I've used the following software when designing masks:

https://www.juspertor.com/

I used L-Edit. It is a software specifically for mask drawing.

Hello Khalil,

i would say there are three major players here: L-edit from Tanner Tools, Cadence from Synopsys and Expert from Silvaco. I personally prefer Expert since I use ATLAS and ATHENA for device simulation and also SmartSPICE for circuit simulation. All these tools are provided by Silvaco.

You could try using " LASI 7 " ... written by Dr. D.E. Boyce (USA).

Have a look at .... http://lasihomesite.com/ .. you can also download the program from that site ..

Lasi includes various Tutorials .. and is easy to use.

Scaling is basically up to you .. and the software supports the transfer of drawings to GDSII and CIF formats amongst others .. GDSII and CIF being compatible with many mask making pattern generator systems.

L-edit would be most appropriate what Chee-Wei Lee has mentioned. I used version 11.01 using GDS II as the standard file format. The mask file can be send to a photomask provider company, such as 'Advance Reproduction' to print the mask in a quartz plate. It is better to know what size of quartz plate is required to match the mask aligner your institute own.

We have been using DW2000 from Design Workshop Technologies over the past 20 years (http://www.designw.com/EDA-Overview.php). It is well adapted for low to medium complexity designs (not digilal ULSI circuits). We use it e.g. for microsensors (pressure, magnetic) and analog or mixed-mode electronics. It produces either a std GDSII output or other formats directly usable for use in maskshop or for e-beam lithography.

Two more suggestions:

- Layout editor, http://www.layouteditor.net/

- CLEwin, http://www.phoenixbv.com/product.php?prodid=50010105&prodtext=CleWin_5

LASI is a good choice in the fact that is freeware, but it requires a little more learning time than Layout or CLEwin.

AutoCAD or any other CAD tool are possible choices, but they require more attention when the output is to be converted into GDS format

CLEWIN is the simplest and the best choice............................................

Hi! I usually use Inskape (free) literally to paint the design. Than we save it as dmx and open dmx it in Clewin to save in a readable for e-beam software  gds format . Alternatevely, you can use Layout Editor which is very good but no free. 

If you need details - let me know.

Denis.

I`m Using Lasi Software For MEMS Devices Mask Designs.it Is The quite easy to use.

I am using AutoCAD and you can learn it in couple hours.

how to convert the DXF files to GDS file format

There are number of software tools are available for mask-design, you can use any of them based on your convenient.

1. L-Edit

2. Clewin

3. IntelliCAD

4. Klayout

CAD tools will automatically develop masks, otherwise for direct writer ML-3 CleWin

how can i make mask by using corel draw.