For example if my thin film sample is made of nanostructures and those structures are porous, how to calculate the porosity? Is BET measurement a must?
You may get % of porosity from ellipsometry. You will also get the average pore size and pore size distribution from small angle X-ray scattering (SAXS) of your films. However, BET may be necessary. If you don't have the instrument for thin film analysis directly, you may scratched off materials from the films and carry out the BET analysis from the powder samples.
@Jan M Englert and @Anirban Dandapat: Actually my sample is thin film, and scratching the same will not provide enough powder needed for BET facility avilable to me, that's why I was thinking about alternative, however, thank you all for suggesting ellipsometry, I will try with it. Can anyone provide me link of any article where the analysis of porosity with ellipsometry is demonstrated? I am well familiar with ellipsometry and published few papers on ellipsometry, I can try if the basic technique about measuring porosity is provided.