I had found some literature that develops MEMS stress sensor (CMOS, N-MOS, P-MOS). However, I can't find commercial solutions for this type of sensor. Is there any replacement? (Stress measurement, tiny dimension).
There are many types of stress sensor. All pressure sensors can be used for this purpose. Sure there are mems pressure sensor. As material wise one can use resistive or capacitive sensors. Very thin sheet of semiconductors can be used as diaphragms to receive the pressure. There is also the piezoelectic materials which can be used as a pressure sensor. You may refer to the site in the link:
There are many types of stress sensor. All pressure sensors can be used for this purpose. Sure there are mems pressure sensor. As material wise one can use resistive or capacitive sensors. Very thin sheet of semiconductors can be used as diaphragms to receive the pressure. There is also the piezoelectic materials which can be used as a pressure sensor. You may refer to the site in the link:
@Abdelhalim Zekry Thanks. Indeed, I can find some mems pressure sensor packaged in tiny dimension. However, it seems that pressure sensor usually measure the air pressure. My target application is measuring the stress between two contact surface within tiny area.